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A charge correction cell for FGMOS-based circuits

Rodríguez Villegas, Esther; Yúfera García, Alberto; Rueda Rueda, Adoración

Abstract

This paper describes a novel cell used in circuits with Floating Gate MOS transistors (FGMOS) to compensate variations in the device effective threshold voltages caused by the trapped charge at the floating gate. The performance of the circuit is illustrated with experimental results showing a residual error below 1%. This coarse compensation makes possible to reduce charge effects to the same order of magnitude than the conventional mismatching in normal MOS transistors.

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Abs ac This pape desc ibes a no el cell used in ci cui s wi h Floa ing Ga e MOS ansis o s (FGMOS) o compensa e a ia ions in he de ice e ec i e h eshold ol ages caused by he apped cha ge a he loa ing ga e. The pe o mance o he ci cui is illus a ed wi h expe imen al esul s showing a esidual e o below 1%. This coa se compensa ion makes possible o educe cha ge e ec s o he same o de o magni ude han he con en ional misma ching in no mal MOS ansis o s. Key wo ds: FGMOS analog ci cui s, Floa ing ga e cha ge co ec ion. 1. In oduc ion Impo an d i e s o mic oelec onics in he las yea s has been low powe and low ol age po able sys ems ma ke . The in e es o IC designe s has ocused in he de elopmen o digi al and analog echniques in ended o minimize bo h powe and ol age supply. Among he analog me hods, he use o he Floa ing Ga e MOS ansis o has eme ged as one o he mos p omising and challenging as well [1]. Wo king wi h FGMOS o ces designe s o ackle wi h se e al p oblems ela ed o he exis ence o he loa ing node. One o i s main sho comings in he low ol age and low powe con ex has o do wi h he cha ge ha can s ay apped a he loa ing ga e du ing he ab ica ion p ocess. This pape p oposes a ou - ansis o cell which compa es he h eshold ol age o a no mal MOS de ice wi h he one o an iden ical sized FGMOS and p o ides an ou pu depending on he alue o he apped cha ge. Connec ing i o he FGMOS ansis o s in he ci cui , he change o hei h eshold ol ages caused by ha e m can be compensa ed. Sec ion 2 will desc ibe he mos common used echniques o apped cha ge e asing/p ocessing in FGMOS ci cui s. In Sec ion 3, ou p oposed ci cui is in oduced and a p ac ical ealiza ion is epo ed whose expe imen al beha iou is explained in Sec ion 4. 2. Cha ge Induced Co ec ion Techniques One o he d awbacks o he use o FGMOS ansis o has is ha he quan i y o cha ge apped a i s ga e du ing he ab ica ion p ocess is unknown. This cha ge could be ei he an ad an age o a disad an age depending on he applica ion he ansis o is going o be used. The solu ions designe s ha e adop ed o dealing wi h his p oblem could be classi ied in: solu ions o ien ed o con ol ha cha ge, as he unc ionali y o he ci cui is based on i s exac alue, and solu ions ying o e ase i , since i s p esence could spoil he block pe o mance. The mos ele an echniques a e: 1) The use o he unnel e ec and he ho elec on injec ion [2], [6]. 2) The applica ion o Ul aViole Ligh (UV) o cha ge cleaning [3], [4]. 3) Fixing an ini ial elec ical condi ion a he loa ing ga e [5]. The i s echnique con ols he cha ge ei he posi i e o nega i e. The use o bo h p ocesses ( unnelling and ho elec on injec ion) allows inc emen o dec emen o cha ge. They could also be combined wi h he aim o e asing, bu ha would b ing se e al added d awbacks as A Cha ge Co ec ion Cell o FGMOS-based Ci cui s Es he O. Rod íguez-Villegas, Albe o Yú e a, Ado ación Rueda Ins i u o de Mic oelec ónica de Se illa (IMSE-CNM), Uni e sidad de Se illa, Edi icio CICA, c/ Ta ia s/n, 41012-SEVILLA, SPAIN. emails: [email p o ec ed], { ueda, yu e a}@imse.cnm.es o example he need o addi ional ci cui y as well as he use o high ol ages. Besides, hey a e no modelled in all he echnologies. Hence, he i s s ep would be o model hem, and his is no a simple ask. Only a ew designe s ha e done i o ce ain echnologies [1]. The cleaning wi h ul a iole ligh is based on he ac ha when he su ace o any semiconduc o is ligh ened wi h ligh o any o he elec omagne ic adia ion, pa o i is e lec ed, pa o i is abso bed, and he es is ansmi ed. The numbe o abso bed pho ons is p opo ional o he o al numbe o hem, and he e o e o he ligh in ensi y. I also depends on he kind o semiconduc o , wa e leng h o he pho ons and he applied elec ic ield. When he loa ing ga e is ligh ened wi h UV ligh , he elec ons apped a he ga e can a el h ough he po en ial ba ie in he in e ace Oxide/Silicon. The main d awback his echnique has is ha i depends on he kind o passi a ion making mo e o less easy o elimina e he cha ge. Howe e , his is he simples me hod as no ex a ci cui y is equi ed. The hi d echnique is e y use ul in ce ain examples bu i is no as gene al as he UV cleaning. I consis s o sho -ci cui ing he loa ing ga e o a ce ain alue (VFG(0)) ha would se he wished ope a ing poin o a ce ain combina ion o inpu s. I would e ol e o a high impedance s a e a e wa ds [5]. This echnique has a lo o de ac o s among some FGMOS designe s who hink he ga e is no loa ing any mo e. Ha ing a swi ch accessing o i has he d awback ha , e en when his is in a high impedance s a e, he e is a leakage cu en lowing h ough he swi ch ha will discha ge he loa ing ga e a e some ime. I would be needed o e esh he ga e wi h a ce ain equency, in he o de o kHz. This would no ha e o be a p oblem in digi al cells ha ca y ou a lo o ope a ions in ha ime. In analog ci cui s i is no easy o use, hough, as an adequa e ese con igu a ion has o be ound which makes he ci cui e ol es as enough a e wa ds. 3. The Ci cui o Cha ge E o Sensing and Co ec ion A Floa ing Ga e MOS ansis o (FGMOS)isaMOS ansis o whose polysilicon ga e, comple ely w apped in silicon dioxide, has no DC pa h o a ixed po en ial. I can modula e he channel be ween a sou ce and d ain and he e o e i can be used in compu a ion. The coupling capaci o s o he loa ing ga e becomes e ec i e ga es o he de ice, depending he ga e s eng h upon he capaci o size [7]. This is ma hema ically desc ibed by eq.(1) which ep esen s he ol age a he loa ing ga e in an N-inpu FGMOS ansis o , whose inpu capaci ances and ol ages a e Ciand Vi, espec i ely, and CGD,CGS and CGB a e he capaci i e couplings o he o he e minals: d ain, sou ce and bulk. CTis he alue o he o al capaci ance seen om he loa ing ga e. (1) being, (2) The las e m in eq.(1) akes in o accoun he con ibu ion o he ga e ol age o he cha ge ha can s ay apped on i du ing he ab ica ion p ocess. I his exp ession is mapped o he ga e ol age in he cu en law o a no mal MOS ansis o he new equa ions o he FGMOS a ise, in which he e m QFG/CTcan be associa ed o he nominal h eshold ol age, and a new e ec i e one can be de ined. The la e di e s o he same pa ame e o VS VD VB Vn V2 V1 VFG(0) Fig. 1. Technique o se he ini ial condi ions a he loa ing ga e. VFG Ci CT ------- Vi CGB CT -----------VB ++ i1= N ∑ = CGD CT ----------- VD CGS CT ---------- VS QFG CT ----------- +++ CTCi i1= N ∑CGB CGD CGS +++= an iden ical MOS ansis o whene e his e m is di e en om ze o. The ci cui p esen ed in his pape o cha ge sensing and co ec ion is d awn in Fig. 2. The basic idea elies on he compa ison be ween he ga e ol ages o wo ansis o s, a MOS and a FGMOS, wi h equal aspec a ios (M1 and M2, espec i ely). I he d ain cu en is he same in bo h, he ga e ol age will also be he same. A e a ew basic manipula ions, i he ansis o pai s M1-M2 and M3- M4 a e iden ical and he de ia ions in he h eshold ol ages (V h) and cu en ac o (β) o igina ed by misma ching a e negligible, he VFG2 ol age a he loa ing ga e o M2 can be exp essed as: (3) Subs i u ing he le hand side in eq.(3) by i s exp ession as unc ion o he ansis o ’s e minal ol ages, he alue o he apped cha ge a he loa ing ga e could be ob ained as: (4) being CGD he ga e o d ain capaci ance o ansis o M2 and Vou 2o ep esen s he alue o Vou 2’s in absence o apped cha ge. Hence, i and , o , . The linea ela ionship in eq.(4) makes possible o sense ∆Qcha ge by means o a s aigh line cu e. This p ocess is shown in Fig. 3 o he wo s aigh line pa ame e s: slope (m) and o igin coo dina e (b). Fo a cons an ol age Vin, he de ia ion o Vou 2 om i s expec ed nominal alue is: (5) This means ha he induced cha ge e o can be measu ed as a ol age inc emen in he ou pu e minals. Le us conside now he ci cui in Fig. 4. All he ansis o s ha e he same sizes, and he inpu capaci ances ha e he same alues in he wo FGMOS. One o he inpu s in he wo FGMOS ansis o s (M2 and M5) is connec ed o Vou 2. The o he h ee a e connec ed o Vin, bu hey could in gene al ha e di e en ol ages. I we Conside ha he ∆Qinduced e o is he same in M2 and M5 and he ol age a he loa ing ga e o he second FGMOS ansis o , VFG5, hen: (6) which has a nominal alue, VFG5o, gi en by he i s wo e ms o he igh hand side in eq.(6), and an e o e m which is cancelled hanks o he connec ion o he ou pu o he p e ious block (eq.(5)): (7) The ou pu o his block will be he ol age VG6. I s alue will sense he ol age a VFG5. Hence he e o due o he apped cha ge a a loa ing ga e can be co ec ed by connec ing he ansis o o he ou pu o a block like he VFG2Vin ≈ ∆Q Cox --------- Vin Cin CT ---------Vin Cou CGD +() CT -------------------------------------Vou 2=––≈ 1 Cin CT --------- –    Vin Cou CT ------------ CGD CT ------------ +    Vou 2o∆Vou 2 +()– CGD CGS CGB ,, Cou « Cou Cin =∆Q0=Vou 2oVin ≈ Fig. 2. Basic ci cui o sensing he apped cha ge. V in M1 M2 M3 M4 V DD V ou 2 (C ou ) (C in ) Fig. 3. G aphic ep esen a ion o eq. (4) o ex ac ∆ Q ela ed pa ame e alues. Vou 2 Vin b ∆Q Cox ---------- – Cin CT --------- CGD CT -------------+ ------------------------------= m 1 Cin CT --------- – Cin CT --------- CGD CT -------------+ ------------------------------= ∆Vou 2 CT Cin -------- ∆Q Cox --------- –≈ VFG5 3Cin CT ----------- Vin Cin CT -------- Vou 2o Cin CT -------- ∆Vou 2 ∆Q CT -------- ++ +== VFG5o∆VFG5VG6 =+ ∆VFG5 ∆Q Cox ---------1Cin Cin -------- –   ≈0= one in Fig. 4, in he way ha has been p e iously p esen ed. The ansis o s in his block ha e o be designed wi h he same aspec a io as he one’s whose de ia ions a e wan ed o be co ec ed, and he inpu capaci ances mus be much la ge han he ga e o d ain pa asi ic. 4. Expe imen al Resul s To p o e his idea, a ci cui p o o ype has been ab ica ed and es ed. This p o o ype consis s in wo ci cui s: one wi h he con igu a ion in Fig. 4, and ano he wi h he schema ic in Fig 5. The mic o pho og aph o he chip is shown in Fig. 6. I has been ab ica ed in a 0.8µm, double polysilicon CMOS echnology. Aspec - a ios o NMOS ansis o a e (W/L)=(4µm/1µm), while inpu capaci o s a e equals o 100 F. In he es p ocess, o he i s con igu a ion, Vin is se o 1.5V. The loa ing-ga e ol age alues a e sensed h oughou he ga es o M2 and M6, gi ing he Vou 2 and VG6 signals. The M4 and M7 ansis o s a e equals, so load e ec is he same. The alues ob ained o he ou pu ol ages a e Vou 2 =V G6 =1.03V. These a e nea ly equal, so hese means ha ∆Qis e y low o his un o echnology. Ci cui in Fig. 5se es us o p o e eq. (5). A ol age signal, Ve o , has been connec ed o one o he inpu ga es o M2 and M5. This allows o gene a e an equi alen e o on bo h ansis o ha will ep oduce he ∆Qe ec s. The esponses o he wo ci cui s a e shown in Fig. 7. I can be no iced how Vou 2 is a ec ed by his e o while VFG6 is nea ly cons an , and equal o he alue measu ed be o e. This p o es he e o co ec ion mechanism. The VG6 ol age changes only 1% a ound 1.03V when Ve o goes om 0.4V o 1.5V. The p oposed cell can be used o cha ge con ol in con inuous ime FGMOS based il e s, as o example he epo ed in [8]. Figu e 8 shows he FGMOS e sion o a ansconduc o . Cha ge apped a each M1 and M2 ansis o s can be cancelled by adding an ex a inpu and connec ing i o he p oposed cell in his pape . The esul s o his applica ion example will be shown a he con e ence (o a he inal e sion o he pape ). Vin M1 M2 M3 M4 VDD Vou 2 M6 M5 M8M7 V G6 VDD VDD VDD Fig. 4. Ci cui o sensing and compensa ing he apped cha ge e ec s. Fig. 5. ∆ Q simula ion e o ci cui by means o Ve o signal in he p oposed con ol es ci cui . Ve o Vin M1 M2 M3 M4 VDD Vou 2 M6 M5 M8M7 V G6 VDD VDD VDD Fig. 6. Mic opho og aph o cha ge con ol ci cui . 5. Conclusions A ou - ansis o cell, in ended o coa sely co ec e ec i e h eshold ol age o se s due o apped cha ge du ing he ab ica ion p ocess in he FGMOS ansis o s has been p esen ed in his pape . I s unc ionali y has been p o en The esidual e o a e applying he co ec ion mechanism become smalle han 1% he alue o he ini ial induced e o e m in FGMOS de ices wi h W/L=4µm/1µm and inpu capaci ances in he o de o 100 F. 6. Re e ences [1] P. Hasle and T. S. Lande: “Special Issue on Floa ing-Ga e De ices, Ci cui s, and Sys ems,” IEEE T ansac ion on Ci cui s and Sys ems, Pa II: Analog and Digi al Signal P ocessing, ol. 48, n. 1, Jan., 2001. [2] M. Lenzlinge and E. H. Snow, “Fowle -No dheim unneling in o he mally g own SiO2”, J. Appl. Phys., ol.40, no.1, pp. 278-283, 1969. [3] L. A. Glasse , “A UV w i e-enabled PROM,” Chapel Hill Con e ence on VLSI (1985), H. Fusch, El. Rock ille, MD: Compu e Science P ess, pp.61-65, 1985. [4] D. A. Ke ns, J. Tanne , M. Si ilo i, and J. Luo, “CMOS UV-w i able non- ola ile analog s o age,” Ad anced Resea ch in VLSI, C. H. Sequin, Ed. Camb idge, MA:MIT P ess, pp. 245-261, Uni. o Cali o nia San a C uz, 1991. [5] K. Ko ani, T. Shiba a, M. Imai, T. Ohmi, “Clock-Con olled Neu on-MOS Logic Ga es,” IEEE T ansac ions on Ci cui s and Sys ems-II: Analog and Digi al Signal P ocessing, ol.45, pp. 518-522, Ap . 1998. [6] P. Hasle , “Founda ions o lea ning in analog VLSI,” Ph.D. Disse a ion, Cali o nia Ins i u e o Technology, Pasadena, CA, 1997. [7] E. Rod íguez-Villegas: “Low Vol age and Low Powe Analog and Digi al Design wi h he Floa ing Ga e MOS ansis o (FGMOS),” Ph.D. Thesis, U. o Se ille, Sep. 2002. [8] E. Rod íguez-Villegas, A. Rueda, A. Yú e a. “A 1.5V 23MHz Low Powe FGMOS Fil e ” In e na ional Con e ence on Elec onics, Ci cui s and Sys ems (ICECS’2001), pp. 337-340, 2001. [9] B. A. Minch, “Analysis, Syn hesis, and Implemen a ion o Ne wo ks o Mul iple-Inpu T anslinea Elemen s,” Ph. D. Thesis, Cal ech, Pasadena, CA, 1997. 1.4 1.41 1.42 1.43 1.44 1.45 1.46 1.47 1.48 1.49 1.5 0.8 0.85 0.9 0.95 1 1.05 1.1 1.15 1.2 V ou 2 V G6 1.2 0.8 1.0 Vol age (V) 0.4 1.50.9 (050mV/di ) Ve o (V) (50mV/di ) Fig. 7. E olu ion o Vou 2 and VG6 when a ol age signal ( Ve o ) is applied o simula ing a ∆ Q cha ge on M2 and M6 loa ing ga es. VCM V CM V DD gnd Vi2 VCM V DD V CM VCM V CM V DD gnd Vi1 VCM V DD V CM ISS Fig. 8. FGMOS -based T ansconduc o . I1I2 Vou M 1 M 2 V DD V DD