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Influence of silver content on the tribomechanical behavior on Ag-TiCN bioactive coatings

Sánchez López, Juan Carlos; Abad, Manuel D.; Carvalho, I; Escobar-Galindo, Ramón; Benito, N; Ribeiro, S; Henriques, M.; Cavaleiro, A.; Carvalho, S.

Abstract

urface modification of bulk materials used in biomedical applications has become an important prerequisite for better biocompatibility. In particular, to overcome the particle generation, low-wear coatings based on carbon (nitrogen) and containing antimicrobial elements such as silver are promising candidates. Thus, the present work explores the potentialities of silver-containing carbonitride-based (Ag-TiCN) thin films prepared by direct current unbalanced reactive magnetron sputtering. The silver content in the coatings was varied from 0 to 26.7 at.% by changing the targets and the fraction of C2H2 and N2 in the gas mixture with Ar. The obtained Ag-TiCN based coatings were characterized in terms of composition and microstructure. Mechanical and tribological properties of the films were studied by nanoindentation and reciprocating pin-on disk testing in a fetal bovine serum solution, respectively. Raman, scanning electron microscope and energy dispersive X-ray analysis was carried out in the contact region after tribological tests to obtain information about the friction mechanism. The cytotoxicity of the coatings was assessed by in vitro tests using fibroblast cells. The coatings comprised a mixture of TiCxN1 − x, Ag and a-C(N)x phases whose relative proportion varied depending on the Ag/Ti ratio. The mechanical, tribological and cytotoxicity properties were correlated with the chemical and phase composition. When the Ag/Ti ratios were below 0.20 (Ag contents < 6.3 at.%) the films resulted harder (~ 18 GPa) with higher wear resistance (~ 10−6 mm3/Nm), showing similar friction coefficient (~ 0.3) and good biocompatibility.

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1 In luence o sil e con en on he ibomechanical beha iou on Ag- TiCN bioac i e coa ings J.C. Sánchez-López1, M.D. Abad1, I. Ca alho2, R. Escoba Galindo3, N. Beni o4, S. Ribei o2, M. Hen iques5, A. Ca alei o6, S.Ca alho2 1Ins i u o de Ciencia de Ma e iales de Se illa (CSIC-US), A da. Ame ico Vespucio 49, 41092 Se illa, Spain 2Uni e sidade do Minho, Dep . Física, Campus de Azu ém, 4800-058 Guima ães, Po ugal 3 Ins i u o de Ciencia de Ma e iales de Mad id (ICMM-CSIC), Can oblanco, 28049, Mad id, Spain 4 Depa amen o de Física Aplicada (CXII), Uni e sidad Au ónoma de Mad id, Can oblanco, 28049, Mad id, Spain 5 IBB-Ins i u e o Bio echnology and Bioenginee ing Cen e o Biological Enginee ing Uni e sidade do Minho Campus de Gual a , 4700-057, Po ugal 6 SEG-CEMUC Mechanical Enginee ing Depa men , Uni e si y o Coimb a, 3030- 788 Coimb a, Po ugal Abs ac Su ace modi ica ion o bulk ma e ials used in biomedical applica ions has become an impo an p e equisi e o be e biocompa ibili y. In pa icula , o o e come he pa icle gene a ion, low-wea coa ings based on ca bon (ni ogen) and con aining an imic obial elemen s such as sil e a e p omising candida es. Thus, he p esen wo k explo es he po en iali ies o sil e -con aining ca boni ide-based (Ag-TiCN) hin ilms p epa ed by di ec cu en unbalanced eac i e magne on spu e ing. The sil e con en in he coa ings was a ied om 0 o 26.7 a .% by changing he a ge s and he ac ion o C2H2 and N2 in he gas mix u e wi h A . The ob ained Ag-TiCN based coa ings we e cha ac e ized in e ms o composi ion and mic os uc u e. Mechanical and ibological p ope ies o he ilms we e s udied by nanoinden a ion and ecip oca ing pin-on disk *Manusc ip changes highligh ed Click he e o iew linked Re e ences 2 es ing in a e al bo inum se um solu ion, espec i ely. Raman, SEM and ene gy dispe si e X- ay (EDX) analysis was ca ied ou in he con ac egion a e ibological es s o ob ain in o ma ion abou he ic ion mechanism. The cy o oxici y o he coa ings was assessed by in i o es s using ib oblas cells. The coa ings comp ised a mix u e o TiCxN1-x, Ag and a-C(N)x phases whose ela i e p opo ion a ied depending on he Ag/Ti a io. The mechanical, ibological and cy o oxici y we e co ela ed wi h he chemical and phase composi ion. When he Ag/Ti a ios we e below 0.20 (Ag con en s < 6.3 a .%) he ilms esul ed ha de (18 GPa) wi h highe wea esis ance (10-6 mm3/Nm), showing simila ic ion coe icien (0.3) and good biocompa ibili y. Keywo ds: Biocompa ibili y, sil e , nanocomposi e, amo phous ca bon phases, ibology, e al bo ine se um, wea mechanism, cy o oxici y. 3 1. In oduc ion Applica ion o hin ilms in he biomedical enginee ing ield ep esen s an a ac i e challenge due o he mul iple si ua ions whe e hey may imp o e o e en unc ionalize a ce ain pa o he human body. Al hough he use o hip implan s is con inuously inc easing, implan ailu e is a huge p oblem o bo h he pa ien and go e nmen al agencies, once i in ol es epea ed su ge ies and consequen ly conside able economical esou ces, as well as pa ien s’ dea h. This ailu e can be a ibu ed o excessi e wea and wea deb is and also o mic obial in ec ion, which p omo es he sho du abili y [1]. Fo hese easons he in es iga ion o new bioma e ials is equi ed o ob ain good mechanical, ibological and biological p ope ies ha allow he de elopmen o be e p os hesis. To o e come he p oblem o pa icle gene a ion, he use o a e y low wea coa ing ma e ial as diamond-like ca bon (DLC), ansi ion-me al ca bides (MeCx), ni ides (MeNx), o o he s p o ec i e hin ilms, ha e been p oposed [2-5]. In ecen yea s, he esea ch has been di ec ed owa ds he use o an ibac e ial ma e ials ha could educe he ailu e o medical de ices p o oked by he in ec ions. Many o hese s udies ocus on he use o sil e , which is known o be an an imic obial elemen [5-8]. When sil e is ans o med in ions and en e s he en i onmen , he mul iplica ion o bac e ia may be s opped because i is belie ed ha Ag+ abso bs he p o eins o he cell wall [9]. The an ibac e ial ac i i y is dependen on he o al amoun o Ag+ ions which is esponsible o he des uc ion o he bac e ia. Con e sely, i he quan i y o sil e eleased om he ilms is oo high i can p oduce cy o oxici y [10]. Ea ly wo ks ha e s udied he combina ion o ha d phases (TiN o TiC), ha p o ide ha dness, wi h sil e as so me al o play he ole o lub ican , o in es iga e hei ibological pe o mance [11,12]. Fo he use in a i icial implan s, good 4 biocompa ibili y is also equi ed, in pa icula due o he known oxici y o he sil e o he human body. In he las ew yea s, he esea ch e o s ha e been di ec ed o assess he he biocompa ibili y o hese mul iphase nanocomposi e ma e ials wi h op imum ibological p ope ies [5,6, 13-15]. We ha e in es iga ed p e iously he deposi ion o TiC(O)N-based coa ings by di ec cu en (DC) magne on spu e ing gaining knowledge abou he syn hesis condi ions ha yielded a good comp omise be ween ibological and ha dness p ope ies [16,17]. In he p esen s udy he addi ion o a iable concen a ions o Ag in o TiCN ilms is explo ed wi h he goal o main aining a good ibological pe o mance wi hou cy o oxici y e ec s. To achie e his pu pose, he coa ings a e e alua ed in e ms o s uc u e and composi ion and he ibological p ope ies a e s udied in lub ica ed condi ions using e al bo inum se um (FBS) o simula e he biological condi ions. The inal mechanical and ibological pe o mance is co ela ed wi h he e olu ion o he a io o Ag/Ti inside he coa ings as well as he e ec o he Ag con en in he cy o oxici y. 2. Expe imen al De ails Ag-TiCN samples we e deposi ed by eac i e DC magne on spu e ing using an Alca el SCM650 appa a us on o polished and ul asonically cleaned 316L s eels and single c ys alline silicon (100) subs a es. Two ypes o a ge s (pu e Ti and mixed Ti/Ag) o dimensions (200100 mm2) we e used in A +C2H2+N2 mix u es, wi h he subs a es o a ing a 70 mm o e he a ge a a cons an speed o 7 pm. A gon low was kep cons an a 60 sccm while he eac i e gases luxes, C2H2 and N2, we e changed in he anges o 5-11 and 5-12 sccm, espec i ely, in o de no o change signi ican ly he C and N con en s. This ep esen s a a ia ion o he wo king p essu e o he deposi ion chambe be ween 0.31 o 0.47 Pa. The ilms we e g own a a cons an 5 empe a u e (300 ºC) and bias ol age (-70 V). Va ying he densi y o cu en applied o each magne on and he chemical composi ion o he mixed Ti/Ag a ge , a se o samples was p epa ed wi h Ag con en a ying om 0 o 26.7 a . %. Fu he de ails abou he syn hesis condi ions can be ound elsewhe e [18]. The a omic composi ion o he deposi ed samples was measu ed by elec on p obe mic oanalysis (EPMA) using a Cameca SX 50 appa a us. Ball c a e es s we e used o ob ain he ilm hickness. The s uc u e and phase dis ibu ion o he coa ings we e de e mined by X- ay di ac ion (XRD) using a con en ional Philips PW 1710 di ac ome e , ope a ing wi h Cu Kα adia ion, in a B agg–B en ano con igu a ion. X- ay pho oelec on spec oscopy (XPS) was measu ed using a hemisphe ical analyze (SPECS EA-10 Plus) and Al K adia ion as exci ing sou ce a a cons an powe o 300 W. The pass ene gy was 15 eV gi ing a cons an esolu ion o 0.9 eV. The Ag 3d5/2 line a 367.9 was used o calib a e he binding ene gies. The samples we e spu e - cleaned in si u using a b oad 3 keV A + beam o 10 minu es. Ha dness measu emen s we e conduc ed using a Mic oMa e ials Nano es sys em equipped wi h a Be ko ich inden e applying a maximum load o 10 mN. Co ec ion o he geome ical de ec s in he ip o he inden e , he mal d i o he equipmen and unce ain y o he ini ial con ac was done [19]. The esidual s esses, , we e ob ained by he de lec ion me hod om he S oney’s equa ion, using subs a e cu a u e adii, bo h be o e and a e coa ing deposi ion [20]. The ibological p ope ies we e e alua ed by ecip oca ing ic ion es s using alumina-6-mm balls in dilu ed e al bo ine se um (FBS, 10% solu ion in wa e ) in a CSM ibome e . The es pa ame e s we e se o 0.5 N o applied load; 3 mm/s o linea speed o e a ack leng h o 3 mm and 3000 cycles. The speci ic ilm wea a e was es ima ed a e di iding he wo n olume by he applied load and he sliding dis ance. Scanning elec on mic oscopy (SEM) and ene gy 6 dispe si e X- ay analysis (EDX) o he ic ion con ac egion we e eco ded in a FEG Hi achi S5200 mic oscopes ope a ing a 5 keV. Raman spec a measu emen s (200- 2000 cm-1) we e ca ied ou in a LabRAM Ho iba Jobin Y on spec ome e equipped wi h a CCD (cha ge-coupled de ice) de ec o and a He-Ne lase (532 nm) a 5 mW. Cy o oxici y es s we e pe o med using ib oblas s 3T3 (CCL-163) ob ained om Ame ican Type Cell Collec ion. Coa ed coupons (p e iously s e ilized a 121ºC o 15 min) we e inse ed in six well pla es and 3 ml o Dulbecco modi ied eagle medium DMEM (Gibco) we e added o each well. The pla es wi h he ma e ials we e hen incuba ed wi h 5% CO2 a 37ºC o 7 days. Meanwhile, he cells we e g own in DMEM con aining 10% o FBS (Gibco) and 1% penicillins ep omicin, PS (Gibco). The cells we e allowed o g ow un il a aining 80% con luence and a e de achmen 500 μL o cell suspension wi h 1x105 cells/ml we e added o each well o a 24 wells' pla e. A e 7 days o ma e ial con ac wi h he medium, 500 μL we e emo ed om each well and added o he pla es wi h cells. The pla es we e incuba ed wi h 5% CO2 a 37ºC o 48h. A e ha ime, all he medium was emo ed and a solu ion con aining 100 μL o MTS (3-(4,5-dime hyl hiazol-2-yl)-5-(3-ca boxyme hoxyphenyl)-2-(4-sul ophenyl)-2H- e azolium, inne sal (P omega CellTi e 96® AQueous Non-Radioac i e Cell P oli e a ion Assay) and 1 ml o DMEM wi hou phenol ed was added o each well. A e 1 h, he abso bance o he esul ing solu ion was ead a 490 nm. The pe cen age o ib oblas s dea h was de e mined by he a io o he di e ence be ween cell g ow h in he absence o Ag-TiCN sample (con ol – 100%) and he g ow h in he p esence o a sample o e he con ol g ow h. The assays we e pe o med a leas h ee imes and in iplica e. 3. Resul s and discussion 7 3.1 Coa ing chemis y and mic os uc u e The chemical composi ion o he deposi ed coa ings ob ained by EPMA is shown in Table 1 oge he wi h he ilm hicknesses and he esul ob ained a e e alua ion o he ibo-mechanical p ope ies. The ca bon con en do no a y signi ican ly om 30 a .%. The N con en dec eases sligh ly om 33.9 o 21.8 a . %, he Ti con en dec eases om 36.9 o 17.9 a . % while he Ag con en inc eases om 0 o 26.7 a %. Oxygen appea s as con aminan in a ange o 4-8 a .%, usually below 5 a .%. Since i anium and sil e display an opposi e end, he Ag/Ti a io will be used he ea e o label he samples and o discuss he changes obse ed in he s uc u e and unc ional p ope ies. The XRD pa e ns ob ained o he di e en Ag/Ti a ios a e shown in Fig. 1. In he i s sample (non-con aining Ag) exhibi h ee e lec ions a 36º, 42º and 61º co esponding o he ypical (111), (200) and (220) peaks o igina ed by a cubic la ice whose posi ions lie in e media e be ween hose o bulk TiC and TiN phases. By conside ing ha he inco po a ed sil e canno o m ca bide o ni ide phases and he comple e mu ual solid solubili y o he TiN-TiC sys em, he o ma ion o a TiCyN1-y phase is o eseen. A con ibu ion o he peak shi due o he comp essi e esidual s ess in he coa ings can be also possible. Wi h he inco po a ion o sil e , he TiCyN1-y di ac ion peaks ge b oade and lose in ensi y concomi an ly wi h he de elopmen o he cha ac e is ic pa e n o me allic sil e . In pa icula , o Ag/Ti a ios abo e 0.40 he main iden i ied peaks co espond o cc-Ag. The g ain size o TiCyN1-y and Ag phases was de e mined by Sche e o mula using he (111) peak. The calcula ed alues a y om 15 down o 9 nm and om 5 up o 8 nm, o TiCyN1-y and Ag espec i ely, wi h he inc ease o Ag/Ti. Unde hese p emises, aking in o accoun he a omic composi ions gi en in Table 1, an excess o C and N is no iced o e he Ti con en and his di e ence becomes mo e signi ican as he Ag con en inc eases. This can be 8 unde s ood by assuming he o ma ion o amo phous ca bon-based phases (a-C and a- CNx) whe e C a oms a e connec ed o C o N a oms p e e en ially by sp2 bonds, as obse ed in p e ious publica ions [21,22]. In o de o ob ain u he in o ma ion abou hese ca bon-con aining phases, XPS analysis was ca ied ou on he C 1s and N 1s pho oelec on spec a o Ag-TiCN coa ings. Fig. 2a shows he C1s spec a o samples wi h Ag/Ti a omic a ios o 0, 0.20, 0.40 and 1.49. The spec a can be decon olu ed in o ou componen s a 282.0 (C-Ti), 283.2 (C-TiO), 285.1 (C-C) and 286.9 eV (C-N) bonds. The i s conclusion ha can be d awn om he analysis is he p edominance o an amo phous ca bon phase o igina ed by he C2H2 p ecu so al hough a ce ain con ibu ion om ad en i ious ca bon canno be disca ded. The ela i e con ibu ion o he ca bide componen s (C-Ti and C-TiO) con inuously dec eases as he sil e con en inc eases, especially o he highes Ag/Ti a ios (0.40, 1.49), whe e he con ibu ion o he C-C and C-N peaks is signi ican ly highe . This esul s in ag eemen wi h he conclusions ob ained p e iously a ending o he changes deno ed in chemical composi ions and XRD da a. In he N1s spec a o Fig. 2b, wo con ibu ions we e ound a 397.0 eV and 399.2 eV asc ibed o N-Ti and N-C bonds, espec i ely. The in ensi y o he N-C componen becomes signi ican when he Ag/Ti inc eases up o 0.40 and 1.49 (in ag eemen wi h he esul s o C1s spec a). By using he da a ob ained om he decon olu ion o he N1s and he elemen al chemical composi ion measu ed by EPMA i was possible o es ima e he phase composi ion as a unc ion o he Ag/Ti a io. The ob ained esul s a e plo ed in Fig. 3. The amo phous CNx is sligh ly inc easing while he main changes a e no iced in he c ys alline phases whe e he inc emen o Ag co ela es wi h a diminu ion o he TiCyN1-y phase. This mul iphase s uc u e will ce ainly ha e an in luence on he unc ional p ope ies o he coa ings ( ibological, mechanical and biological) as we e ise in he nex sec ions. 9 Figu e 4 shows he c oss-sec ional SEM mic og aphs o ac u ed Ag-TiCN samples wi h Ag/Ti a ios o 0, 0.20, 0.40 and 1.49. The ilm mo phology displays a ypical columna -like mic os uc u e al hough ine columns and po osi y is obse ed as he Ag/Ti a omic a io inc eases. This dense mic os uc u e may be a ibu ed o he seg ega ion o he immiscible Ag and a-C(N) phases leading o enuclea ion si es ha dis up s he columna mo phology. Simila beha io has been obse ed p e iously in Ag-C N nanocomposi es [23]. A he highes Ag/Ti a io (Fig. 4d), Ag clus e s a e seg ega ed o he column bounda ies as obse ed be o e [14] which can be iden i ied as b igh e spo s on he su ace. 3.2. Mechanical p ope ies: Ha dness and esidual s ess The ha dness and in e nal s ess alues a e p esen ed in Fig. 5 as a unc ion o he Ag/Ti a io. The ha dness a ied in a ange om 8 o 18 GPa, much lowe han he ypical alues epo ed o pu e TiCN coa ings, anging om 30 o 36 GPa [24-26]. These o e all lowe alues should be ce ainly ela ed wi h mic os uc u al and chemical composi ion aspec s. Thus, low ene ge ic condi ions o he deposi ion (low nega i e subs a e bias and low deposi ion empe a u e) can lead o columna and open mo phologies. The phase composi ion o hese nanocomposi es is also a ec ing he dependence o he mechanical p ope ies as i in luences he balance be ween ha d and so phases and hei dis ibu ion. Thus, acco ding o he achie ed accu acy inc easing Ag con en up o 6.3 a .% does no almos a ec he ha dness; howe e , u he inc ease is accompanied wi h a signi ican ha dness dec ease. A simila beha iou o so me als has been epo ed in he pas in o he sys ems, such as Z N/Cu [27], Z N/Ni [28], o o he s including sil e , Ag/TiN [5] and Ag/TiC [29]. Howe e , i is also likely ha ion- induced de ec s in he ilms du ing he deposi ion o mo e compac ilm mic os uc u e 16 [18] N. K. Manninen, R. Escoba Galindo, N. Beni o, N.M. Figuei edo, A. Ca alei o, S.Ca alho, “Ag-Ti(C,N)-based coa ings o biomedical applica ions: in luence o sil e con en on he s uc u al p ope ies”, Jou nal o Physics D: Applied Physics 44 (2011) 375501. [19] J.M. An unes, A. Ca alei o, L.F. Menezes, M.I. Simões, J.V. Fe nandes, Su . Coa . Technol. 149 (2002) 27. [20] G. S oney, P oc. Roy. Soc. London A 82 (1909) 172. [21] D. Ma ínez-Ma ínez, C. López-Ca es, A. Fe nández, J.C. Sánchez-López, Su . Coa . Technol. 203 (2008) 756. [22] D. Ma ínez-Ma ínez, C. López-Ca es, A. Jus o, A. Fe nández, J. C. Sánchez- López, Solid S a e Sciences 11(2009) 660. [23] C.P. Mulligan, T.A. Blanche , D. Gall,, Su . Coa . Technol. 203 (2008) 584. [24] S.J. Bull, D.G. Bha , M.H. S aia, Su . Coa . Technol. 163 –164 (2003) 499. [25] A.P. Se o, C. Comple o, R. Colaço, F. dos San os, C. Loba o da Sil a, J.M.S. Cab al, H. A aújo, E. Pi es, B. Sa amago, Su . Coa . Technol. 203 (2009) 3701. [26] E.J. Bienk, H. Rei z, N.J. Mikkelsen, Su . Coa . Technol. 76 - 77 (1995) 475. [27] J. Musil, Su . Coa . Technol. 125 (2000) 322. [28] J. Šůna, J. Musil, V. Ondok, J.G. Han, Su . Coa . Technol. 200 (2006) 6293. [29] J.L. End ino, J.J. Nainapa ampil, E. K zanowki, Sc ip a Ma e . 47 (2002) 613. [30] E. Sil a, M. Rebelo de Figuei edo, R. F anz, R. Escoba Galindo, C. Palacio, A. Espinosa, S. Calde on V. , C. Mi e e , S. Ca alho, Su . Coa . Technol. 205 (2010) 2134. [31] J.M. Lackne , W. Waldhause , R. Ebne , R.J. Bakke , T. Schöbe l, B. Majo , Thin Solid Films 468 (2004) 125. [32] C.P. Cons able, J. Ya wood, W.-D. Münz, Su . Coa . Technol. 116–119 (1999) 155–159. [33] J.C. Sánchez-López, A. Fe nández, in: A. E demi , C. Donne (Eds.), T ibology o Diamond-Like Ca bon Films: Fundamen als and Applica ions, Sp inge , New Yo k, 2008, p. 311. [34] K. Holmbe g, A. Ma hews, Coa . T ibology, T ibology se ies, 28 Ed. D. Dowson, Else ie , 1994. 17 [35] J.C. Sánchez-López, D. Ma ínez-Ma ínez, M.D. Abad, A. Fe nández, Su . Coa . Technol. 204, 947-954 (2009). [36] J. L. End ino, J.C. Sánchez-López, R. Escoba Galindo, D. Ho wa , A. Ande s, Jou nal o Physics: Con e ence Se ies 252 (2010) 012005. [37] G. Malich, B. Ma ko ic, C. Winde , Toxicology 124 (1997) 179. [38] P. V. AshaRani, G. L.K. Mun, M. P. Hande, S. Valiya ee il, ACS Nano. 3 (2009) 279. [39] K. Kawa a, M. Osawa, S. Okabe, En i on. Sci. Technol. 43 (2009) 6046. 18 Figu e Cap ions Fig. 1. XRD pa e ns o he Ag-TiCN coa ings deposi ed by DC eac i e magne on spu e ing, wi h di e en Ag/Ti a omic a ios. Fig. 2. C1s (a) and N 1s (b) pho oelec on spec a o 4 ep esen a i e coa ings wi h Ag/Ti a ios o 0, 0.20, 0.40 and 1.49. Fig. 3. Phase composi ion o he samples p epa ed wi h Ag/Ti a ios o 0, 0.20, 0.40 and 1.49. Fig. 4. C oss-sec ional SEM mic og aphs o samples wi h a omic a ios Ag/Ti: a) 0; b) 0.20; c) 0.40 and d) 1.49. Fig. 5. Ha dness and esidual s ess alues o Ag-TiCN coa ings s. he Ag/Ti a omic a io. Fig. 6. Va ia ion o he ha dness and wea a e p ope ies as a unc ion o he a io o so (Ag+CNx)/ha d (TiCyN1-y) phases. Fig. 7. F ic ion coe icien (a) and wea a e (b) alues o Ag-TiCN as a unc ion o he Ag/Ti a omic a io. 19 Fig. 8. Op ical mic og aph o he alumina ball a e he ic ion es on o he Ag-TiCN coa ing wi h 10.8 a . % o Ag (a) and co esponding Raman spec a (b) and EDX (c) analysis. Fig. 9. Op ical mic og aph o he wea ack a e he ic ion es o he Ag-TiCN coa ing wi h 10.8 a . % o Ag (a) and co esponding Raman spec a (b). Fig. 10. The a e o inhibi ion o cellula as a unc ion o he Ag/Ti a omic a io, a e 7days incuba ion. Table 1. Chemical composi ion and ibomechanical p ope ies o he deposi ed Ag-TiCN coa ings. Sample Chemical composi ion a . % Thickness m H GPa  GPa  K mm3/Nm Ag/Ti Ag Ti C N 0 0 36.9 29.2 33.9 2.9 17.0 -0.5 0.29 7.1E-06 0.06 2.0 35.1 29.9 33.0 2.0 17.8 -1.0 0.31 1.9E-05 0.15 4.6 31.1 32.4 31.9 2.4 18.2 -1.4 0.25 5.3E-06 0.20 6.3 31.6 30.5 31.6 1.4 18.0 -1.7 0.26 5.2E-06 0.27 8.0 29.2 29.5 33.3 1.5 16.5 -1.8 0.27 2.8E-05 0.40 10.8 26.9 31.2 31.1 3.0 15.0 -2.5 0.27 3.8E-05 0.77 19.8 25.7 30.6 23.9 2.9 10.0 -1.6 0.28 4.8E-05 1.49 26.7 17.9 33.6 21.8 3.2 8.0 -1.3 0.25 8.7E-05 Table 1 R1 Figu e 1 Click he e o download high esolu ion image Figu e 2a Click he e o download high esolu ion image Figu e 2b Click he e o download high esolu ion image Figu e 3 Click he e o download high esolu ion image Figu e 4 Click he e o download high esolu ion image